Special Issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009ACHENBACK, Sven.Microsystem technologies. 2010, Vol 16, Num 8-9, issn 0946-7076, 391 p.Conference Proceedings

Patterns for design in microtechnologyALBERS, Albert; DEIGENDESCH, Tobias; TURKI, Tarak et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1537-1545, issn 0946-7076, 9 p.Conference Paper

Thickness measurement in ultrathick multilayer microstructuresENGELKE, Rainer; RICHTER, Uwe.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1513-1516, issn 0946-7076, 4 p.Conference Paper

3D UV-microreplication using cylindrical PDMS moldLEE, Dongkeon; MEKARU, Harutaka; HIROSHIMA, Hiroshi et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1399-1411, issn 0946-7076, 13 p.Conference Paper

Easily manageable, electrothermally actuated silicon micro gripperHOXHOLD, B; BÜTTGENBACH, S.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1609-1617, issn 0946-7076, 9 p.Conference Paper

Electroplating of nickel films at ultra low electrolytic temperatureCHUNG, Chen-Kuei; CHANG, W. T; HUNG, S. T et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1353-1359, issn 0946-7076, 7 p.Conference Paper

Methods for simulating and optimizing molded micro components and systemsALBERS, Albert; ENKLER, Hans-Georg; LESLABAY, Pablo et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1517-1527, issn 0946-7076, 11 p.Conference Paper

Design and mixing efficiency of rhombic micromixer with flat anglesCHUNG, C. K; SHIH, T. R; WU, B. H et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1595-1600, issn 0946-7076, 6 p.Conference Paper

Fabrication of UV range light guide plateOKAYAMA, Yuta; YAMASHITA, Kenji; SAWA, Yoshitaka et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1625-1631, issn 0946-7076, 7 p.Conference Paper

Fabrication of micro-capacitive inclination sensor by resin moldingMIYAKE, Hiroaki; NISHIMOTO, Kazufumi; NISHIDA, Satoshi et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1431-1437, issn 0946-7076, 7 p.Conference Paper

Micro liquid rotor operated by surface-acoustic-waveSAIKI, Tsunemasa; OKADA, Katsuhide; UTSUMI, Yuichi et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1589-1594, issn 0946-7076, 6 p.Conference Paper

Method development for epoxy resin analysisNORDT, Sawa; PASCH, Harald; RADKE, Wolfgang et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1347-1351, issn 0946-7076, 5 p.Conference Paper

Micro gear pump with internal electromagnetic driveWALDSCHIK, Andreas; BÜTTGENBACH, Stephanus.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1581-1587, issn 0946-7076, 7 p.Conference Paper

Immunoassay using poly-tetrafluoroethylene microstructure in organic solventUKITA, Yoshiaki; KONDO, Saki; KATAOKA, Chiwa et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1465-1470, issn 0946-7076, 6 p.Conference Paper

Fabrication of cone-like microstructure using UV LIGA-like for light guide plate applicationCHUNG, C. K; SHER, K. L; SYU, Y. J et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1619-1624, issn 0946-7076, 6 p.Conference Paper

Synchrotron laboratory for micro and nano devices: facility concept and designACHENBACH, Sven; SUBRAMANIAN, Venkat; KLYMYSHYN, David et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1293-1298, issn 0946-7076, 6 p.Conference Paper

A vibrating micro-scale CMM probe for measuring high aspect ratio structuresCLAVERLEY, James D; LEACH, Richard K.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1507-1512, issn 0946-7076, 6 p.Conference Paper

Ceramic micro parts produced by micro injection molding: latest developmentsMÜLLER, Tobias; PIOTTER, Volker; PLEWA, Klaus et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1419-1423, issn 0946-7076, 5 p.Conference Paper

How mold inserts influence the replication of metallic microparts produced by electroplating into two-component templatesPROKOP, Juergen; HENEKA, Jochen; LORENZ, Julia et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1413-1418, issn 0946-7076, 6 p.Conference Paper

Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithographyHORADE, Mitsuhiro; SUGIYAMA, Susumu.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1331-1338, issn 0946-7076, 8 p.Conference Paper

Vertical liquid transportation through capillary bundle structure using centrifugal forceKONDO, Saki; AZETA, Tsukasa; UKITA, Yoshiaki et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1577-1580, issn 0946-7076, 4 p.Conference Paper

A polymer-metal hybrid flexible mould and application for large area hot roller embossingXUECHUAN SHAN; JIN, L; SOH, Y. C et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1393-1398, issn 0946-7076, 6 p.Conference Paper

Applying SU-8^™ to the fabrication of micro electro discharge machining electrodesTRAISIGKHACHOL, Ornwasa; SCHMID, Hermann; WURZ, Marc et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1445-1450, issn 0946-7076, 6 p.Conference Paper

Development of a biological detection platform utilizing a modular microfluidic stackFRISCHE, Niklas; DATTA, Proyag; GOETTERT, Jost et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1553-1561, issn 0946-7076, 9 p.Conference Paper

Direct bonding of PFTF sheets assisted by shynchrotron radiation induced surface modificationUTSUMI, Yuichi; YAMAMOTO, Shigeaki; KUROKI, Tomoyuki et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1495-1500, issn 0946-7076, 6 p.Conference Paper